According the ZEMAX output file of the 3D model, the prototype is designed by SolidWorks rapidly, fabricated. After calculating the parameters of the optical path, ZEMAX optical software is used to simulate the system. With the characteristics of MOEMS grating, the structure of the spectrometer system is proposed. Comparing with the traditional spectral system, there is a new structure with a single detector and worked at high frequency. This MOEMS grating is driven by electromagnetic force and integrated with angle sensor which used to monitored deflection angle while the grating working. The MOEMS grating enables the design of compact grating spectrometers capable of acquiring full spectra using a single detector element. The MOEMS grating works as the prismatic element and wavelength scanning element in our optical system. A compact, low cost, high speed, non-destructive testing NIR (near infrared) spectrometer optical system based on MOEMS grating device is developed.
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